Low loss polysilicon waveguides for silicon photonics

Liao, Ling

Low loss polysilicon waveguides for silicon photonics

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38509198-MIT.pdf

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8.56 MB

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Author(s)

Liao, Ling

Advisor(s)

Lionel C. Kimerling.

Date Issued

1997

Publisher

Massachusetts Institute of Technology

Description

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1997.

Includes bibliographical references (leaves 106-109).

Subjects

Materials Science and Engineering

MIT Department

Massachusetts Institute of Technology. Department of Materials Science and Engineering

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http://dspace.mit.edu/handle/1721.1/7582

Persistent DSpace Link

http://hdl.handle.net/1721.1/10230