Demonstration of Integrated Mico-Electro-Mechanical Switch Circuits for VLSI Applications
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Author(s)
Stojanovic, Vladimir Marko
Chen, Fred Fu-Chin
Fariborzi, Hossein
Spencer, Matthew
Nathanael, Rhesa
Wang, Chengcheng
Gupta, Abhinav
Kam, Hei
Pott, Vincent
Jeon, Jaeseok
Date Issued
February 2010
Journal
IEEE International Solid-State Circuits Conference. Digest of technical papers
Publisher
Institute of Electrical and Electronics Engineers
Citation
Chen, F. et al. “Demonstration of integrated micro-electro-mechanical switch circuits for VLSI applications.” Solid-State Circuits Conference Digest of Technical Papers (ISSCC), 2010 IEEE International. 2010. 150-151. © 2010, IEEE
Version
Final published version
Abstract
A testchip demonstrates monolithic integration of micro-electro-mechanical (MEM) switch circuit building blocks for logic, timing, I/O and memory functions. Experimental results show functionality for an inverter, XOR, carry-generation block, oscillator, DAC, latch, and 10-cell DRAM.
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Terms of Use
Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use.
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DOI of Published Version
https://doi.org/10.1109/ISSCC.2010.5434010
