An architecture for flexible distributed experimentation and control with an AME 5000 plasma etcher
Name
36270323-MIT.pdf
Description
Full printable version
Size
6.81 MB
Format
Adobe PDF
Checksum (MD5)
b5a4a7d649d6929066463131b575511c
Author(s)
Gower, Aaron E. (Aaron Elwood)
Advisor(s)
Duane S. Boning.
Date Issued
1996
Publisher
Massachusetts Institute of Technology
Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1996.
Includes bibliographical references (p. 72-74).
Subjects
Electrical Engineering and Computer Science
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Terms of Use
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