A new modeling methodology combining engineering and statistical modeling methods : a semiconductor manufacturing application
Name
36398826-MIT.pdf
Description
Full printable version
Size
10.72 MB
Format
Adobe PDF
Checksum (MD5)
449e74a27f119f57db3e3b9525aefe85
Author(s)
Sharma, Vikas
Advisor(s)
Roy E Welsch, Steven D. Eppinger.
Date Issued
1996
Publisher
Massachusetts Institute of Technology
Description
Thesis (Sc. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1996.
Includes bibliographical references (leaves 120-125).
Subjects
Mechanical Engineering
MIT Department
Massachusetts Institute of Technology. Department of Mechanical Engineering
Terms of Use
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