Control of buckling in large micromembranes using engineered support structures
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Johnson - Iwase et. al..pdf
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Author(s)
Iwase, Eiji
Hui, Pui-Chuen
Woolf, David
Rodriguez, Alejandro W
Johnson, Steven G.
Capasso, Federico
Loncar, Marko
Rodriguez, Alejandro W.
Johnson, Steven G.
Date Issued
June 2012
Journal
Journal of Micromechanics and Microengineering
Publisher
IOP Publishing
Citation
Iwase, Eiji, Pui-Chuen Hui, David Woolf, Alejandro W Rodriguez, Steven G Johnson, Federico Capasso, and Marko Lončar. “Control of buckling in large micromembranes using engineered support structures.” Journal of Micromechanics and Microengineering 22, no. 6 (June 1, 2012): 065028.
Version
Author's final manuscript
Abstract
In this paper we describe a general method to avoid stress-induced buckling of thin and large freestanding membranes. We show that using properly designed supports, in the form of microbeams, we can reduce the out-of-plane deflection of the membrane while maintaining its stiffness. As a proof of principle, we used a silicon-on-insulator (SOI) platform to fabricate 30 µm wide, 220 nm thick, free-standing Si membranes, supported by four 15 µm long and 3 µm wide microbeams. Using our approach, we are able to achieve an out-of-plane deformation of the membrane smaller than 50 nm in spite of 39 MPa of compressive internal stress. Our method is general, and can be applied to different material systems with compressive or tensile internal stress.
MIT Department
Massachusetts Institute of Technology. Department of Mathematics
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DOI of Published Version
https://doi.org/10.1088/0960-1317/22/6/065028
