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Server architecture for MEMS characterization

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Author(s)
Cottrell, Jared D. (Jared Desjardins), 1975-
Advisor(s)
Donald E. Troxel.
Alternative Title
Server architecture for micro electromechanical systems characterization
Distributed data store for MEMS inspection systems
Date Issued
1998
Publisher
Massachusetts Institute of Technology
Description
Thesis (S.B. and M.Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998.
Includes bibliographical references (leaves 85-87).
Subjects
Electrical Engineering and Computer Science
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
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http://dspace.mit.edu/handle/1721.1/7582
Persistent DSpace Link
http://hdl.handle.net/1721.1/47696
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