Real time in-situ monitoring and control of silicon epitaxy by Fourier transform infrared spectroscopy
Name
31262733-MIT.pdf
Description
Full printable version
Size
13.73 MB
Format
Adobe PDF
Checksum (MD5)
bb9ffb0cbf6615abdb4b4440f04e88a7
Author(s)
Zhou, Zen-Hong
Advisor(s)
Rafael Reif.
Date Issued
1994
Publisher
Massachusetts Institute of Technology
Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1994.
Includes bibliographical references (p. 170-182).
Subjects
Electrical Engineering and Computer Science
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Terms of Use
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