Characterization of perfluorocompound emission and abatement kinetics in plasma processes
Name
34791354-MIT.pdf
Description
Full printable version
Size
11.75 MB
Format
Adobe PDF
Checksum (MD5)
607665509cee4aa5a451638305e4940a
Author(s)
Mohindra, Vivek
Advisor(s)
Herbert H. Swain.
Date Issued
1996
Publisher
Massachusetts Institute of Technology
Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1996.
Includes bibliographical references (leaves 136-142).
Subjects
Chemical Engineering
MIT Department
Massachusetts Institute of Technology. Department of Chemical Engineering
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