Macro-modeling of micro-electrical-mechanical system devices

Wang, Qiutao.

Macro-modeling of micro-electrical-mechanical system devices

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41995645-MIT.pdf

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Author(s)

Wang, Qiutao.

Advisor(s)

Jacob White.

Date Issued

1998

Publisher

Massachusetts Institute of Technology

Description

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1998.

Includes bibliographical references (leaves 48-50).

Subjects

Mechanical Engineering

MIT Department

Massachusetts Institute of Technology. Department of Mechanical Engineering

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http://dspace.mit.edu/handle/1721.1/7582

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http://hdl.handle.net/1721.1/9917