Directed self-assembly of a two-state block copolymer system
Name
40580_2018_Article_156.pdf
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2.09 MB
Format
Adobe PDF
Checksum (MD5)
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Author(s)
Do, Hyung Wan
Choi, Hong Kyoon
Gadelrab, Karim Raafat
Chang, Jae-Byum
Alexander-Katz, Alfredo
Berggren, Karl K
Ross, Caroline A.
Date Issued
September 2018
Journal
Nano Convergence
Publisher
Springer Singapore
Citation
Do, Hyung Wan, et al. “Directed Self-Assembly of a Two-State Block Copolymer System.” Nano Convergence, vol. 5, no. 1, Dec. 2018. © 2018 The Authors
Version
Final published version
Abstract
In this work, ladder-shaped block copolymer structures consisting of parallel bars, bends, and T-junctions are formed inside square confinement. We define binary states by the two degenerate alignment orientations, and study properties of the two-state system. We control the binary states by creating openings around the confinement, changing the confinement geometry, or placing lithographic guiding patterns inside the confinement. Self-consistent field theory simulations show templating effect from the wall openings and reproduce the experimental results. We demonstrate scaling of a single binary state into a larger binary state array with individual binary state control. Keywords: Block copolymers, Self-assembly, Graphoepitaxy, Nanostructures, Lithographic confnement
MIT Department
Massachusetts Institute of Technology. Center for Materials Science and Engineering
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Massachusetts Institute of Technology. Department of Materials Science and Engineering
Terms of Use
Creative Commons Attribution
Persistent DSpace Link
DOI of Published Version
https://doi.org/10.1186/s40580-018-0156-z
