Design of a CMOS compatible, athermal, optical waveguide
Name
301560446-MIT.pdf
Description
Full printable version
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8.78 MB
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Checksum (MD5)
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Author(s)
Fernandez, Luis Enrique, S.B. Massachusetts Institute of Technology
Advisor(s)
Lionel C. Kimerling.
Alternative Title
Design of a complementary metal oxide semiconductor compatible, athermal, optical waveguide
Date Issued
2007
Publisher
Massachusetts Institute of Technology
Abstract
This paper explores a possible design for a CMOS compatible, athermal, optical waveguide. The design explored is a slot waveguide with light guided in the low index material. A design paradigm is proposed which shows the relationship between cross-sectional parameters and their impact on both the effective index of refraction and the thermo-optic coefficient of the device. Two materials choices were explored to serve as the low index material, poly(ether imide) (PI) and poly(methyl methacrylate) (PMMA). The slot waveguide with PI as the low index material had a simulated, device thermo-optic coefficient of -8.5 x 10-4K-1, and the slot waveguide with PMMA as the low index material had a simulated, device thermo-optic coefficient of 1.7 x 10-5K-1.
Description
Thesis (S.B.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2007.
Includes bibliographical references (p. 49).
Subjects
Materials Science and Engineering.
MIT Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
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