High-performance MEMS square electrode quadrupole mass filters for chip-scale mass spectrometry
Name
Cheung-2010-High-performance MEMS square electrode quadrupole mass filters for chip-scale mass spectrometry.pdf
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Author(s)
Cheung, Kerry
Velasquez-Heller, Luis Fernand
Akinwande, Akintunde Ibitayo
Date Issued
April 2010
Journal
2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS)
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Citation
Cheung, Kerry, Luis F. Velasquez-Garcia, and Akintunde I. Akinwande. “High-performance MEMS Square Electrode Quadrupole Mass Filters for Chip-scale Mass Spectrometry.” IEEE, 2010. 867–870. Web. 4 Apr. 2012. © 2010 Institute of Electrical and Electronics Engineers
Version
Final published version
Abstract
We report exciting experimental data from a low-cost, high-performance square electrode quadrupole mass filter with integrated ion optics intended for chips-cale mass spectrometry. The device showed a mass range of 650 amu and a maximum resolution of ~80, metrics that are comparable to the state-of-the-art. We demonstrated that operating our device in the second stability region leads to higher performance despite the unconventional electrode geometry. The data also suggests ion behavior that deviates from the standard circular rod case, motivating new studies.
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Massachusetts Institute of Technology. Microsystems Technology Laboratories
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Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use.
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DOI of Published Version
https://doi.org/10.1109/MEMSYS.2010.5442344
