Maskless parallel patterning with zone plate array lithography (ZPAL)
Name
46815994-MIT.pdf
Description
Full printable version
Size
16.95 MB
Format
Adobe PDF
Checksum (MD5)
7cdba5b5ec56a6a65c0808690bb369eb
Author(s)
Gil, Darío, 1975-
Advisor(s)
Henry I. Smith.
Date Issued
2000
Publisher
Massachusetts Institute of Technology
Description
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2000.
Includes bibliographical references (p. 147-150).
Subjects
Electrical Engineering and Computer Science.
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Terms of Use
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