A thin-film silicon microaccelerometer fabricated using electrochemical etch-stop and wafer bonding technology
Name
31267968-MIT.pdf
Description
Full printable version
Size
28.14 MB
Format
Adobe PDF
Checksum (MD5)
12216de1b571b5a2d29b4596229fd1a9
Author(s)
McNeil, Vincent Maurice
Advisor(s)
Martin A. Schmidt.
Date Issued
1994
Publisher
Massachusetts Institute of Technology
Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1994.
Includes bibliographical references (p. 343-360).
Subjects
Electrical Engineering and Computer Science
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
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