Real time interferometric imaging of the plasma etch process
Name
31162756-MIT.pdf
Description
Full printable version
Size
3.66 MB
Format
Adobe PDF
Checksum (MD5)
cf30b6736a826991e69a32d110ebfefa
Author(s)
Claman, Jonathan L. (Jonathan Leonard)
Advisor(s)
Duane S. Boning.
Date Issued
1994
Publisher
Massachusetts Institute of Technology
Description
Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1994.
Includes bibliographical references (leaves 51-52).
Subjects
Electrical Engineering and Computer Science
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Terms of Use
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