Fabrication of large-area 100 nm-period gratings using achromatic holographic lithography
Name
26329656-MIT.pdf
Description
Full printable version
Size
5.65 MB
Format
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Checksum (MD5)
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Author(s)
Yen, Anthony
Advisor(s)
Henry I. Smith.
Date Issued
1992
Publisher
Massachusetts Institute of Technology
Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1992.
Includes bibliographical references (leaves 79-87).
Subjects
Electrical Engineering and Computer Science
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
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