Quantification and reduction of Poisson-Gaussian mixed noise induced errors in ellipsometry
Name
oe-29-17-27057.pdf
Description
Published version
Size
2.65 MB
Format
Unknown
Checksum (MD5)
d3c17fb286c4c432a4f116ae7ecef335
Author(s)
Jiang, Bo
Meng, Kai
Youcef-Toumi, Kamal
Date Issued
August 2021
Journal
Optics Express
Publisher
Optical Society of America
Citation
Jiang, Bo, Meng, Kai and Youcef-Toumi, Kamal. 2021. "Quantification and reduction of Poisson-Gaussian mixed noise induced errors in ellipsometry." Optics Express, 29 (17).
Version
Final published version
Abstract
Ellipsometry is an important metrology tool in a plethora of industries. The measurement accuracy can be significantly affected by the existence of Poisson-Gaussian mixed noise. This paper quantifies the induced error on normalized Mueller matrix measurements through statistical analysis. A method is then proposed to mitigate the effects of Poisson-Gaussian noise in spectroscopic ellipsometry signal demodulation, based on maximum likelihood estimation. The noise is characterized through experiments on an in-house setup. The improved performance of dimension reconstruction from the proposed method is demonstrated through simulations.
MIT Department
Massachusetts Institute of Technology. Department of Mechanical Engineering
Terms of Use
Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use.
Persistent DSpace Link
DOI of Published Version
https://doi.org/10.1364/OE.432793
