Drift correction for scanning-electron microscopy
Name
714248663-MIT.pdf
Description
Full printable version
Size
4.49 MB
Format
Adobe PDF
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df74eea71db160ebc5294cb9a5e43f84
Author(s)
Snella, Michael T
Advisor(s)
Karl K. Berggren and Vivek K Goyal.
Date Issued
2010
Publisher
Massachusetts Institute of Technology
Abstract
Scanning electron micrographs at high magnification (100,000x and up) are distorted by motion of the sample during image acquisition, a phenomenon called drift. We propose a method for correcting drift distortion in images obtained on scanning electron and other scanned-beam microscopes by registering a series of images to create a drift-free composite. We develop a drift-distortion model for linear drift and use it as a basis for an affine correction between images in the sequence. The performance of our correction method is evaluated with simulated datasets and real datasets taken on both scanning electron and scanning helium-ion microscopes; we compare performance against translation only correction. In simulation, we exhibit a 12.5 dB improvement in SNR of our drift-corrected composite compared to a non-aligned composite, and a 3 dB improvement over translation correction. A more modest 0.4 dB improvement is measured on the real image sets compared to translation correction alone.
Description
Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2010.
This electronic version was submitted by the student author. The certified thesis is available in the Institute Archives and Special Collections.
Cataloged from student submitted PDF version of thesis.
Includes bibliographical references (p. 91-92).
Subjects
Electrical Engineering and Computer Science.
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
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