Simulation tools for microelectromechanical systems
Name
49522922-MIT.pdf
Description
Full printable version
Size
7.95 MB
Format
Adobe PDF
Checksum (MD5)
8cac319aae63b0eba1cb8cd3aab9f9b6
Author(s)
Ramaswamy, Deepak, 1974-
Advisor(s)
Jacob White and Keven Amaratunga.
Alternative Title
Simulation tools for MEMS
Date Issued
2001
Publisher
Massachusetts Institute of Technology
Abstract
In this thesis efficient techniques to solve complex 3-D electromechanical problems are developed. Finite element discretization of complex structures such as the micromirror lead to thousands of internal degrees of freedom. Their mostly rigid motion is exploited leading to a mixed rigid-elastic formulation. This formulation's advantage is apparent when it is incorporated in an efficient coupled domain simulation technique and examples are presented exploring geometry effects on device behavior. Then for system level simulation where full device simulation costs add up we need models with much reduced order with little degradation in accuracy. We describe a model reduction formulation for the electromechanical problem based on implicit techniques which accurately capture the original model behavior.
Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Civil and Environmental Engineering, 2001.
Includes bibliographical references (p. 101-104).
Subjects
Civil and Environmental Engineering.
MIT Department
Massachusetts Institute of Technology. Department of Civil and Environmental Engineering
Terms of Use
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