Demonstration of chalcogenide glass racetrack microresonators
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Hu_Demonstration of chalcogenide.pdf
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Author(s) • • • • •
Petit, Laeticia
Hu, Juejun
Richardson, Kathleen
Carlie, Nathan
Kimerling, Lionel C
Agarwal, Anuradha
Date Issued
April 2008
Journal
Optics Letters
Publisher
Optical Society of America
Citation
Juejun Hu, Nathan Carlie, Laeticia Petit, Anu Agarwal, Kathleen Richardson, and Lionel Kimerling, "Demonstration of chalcogenide glass racetrack microresonators," Opt. Lett. 33, 761-763 (2008)
http://www.opticsinfobase.org/abstract.cfm?URI=ol-33-8-761
Version
Author's final manuscript
Abstract
We have demonstrated what we believe to be the first chalcogenide glass racetrack microresonator using a complementary metal-oxide semiconductor-compatible lift-off technique with thermally evaporated As[subscript 2]S[subscript 3] films. The device simultaneously features a small footprint of 0.012 mm×0.012 mm, a cavity Q (quality factor) of 10,000, and an extinction ratio of 32 dB. These resonators exhibit a very high sensitivity to refractive index changes with a demonstrated detection capability of ΔnAs2S3=(4.5×10[superscript −6] ±10%) refractive index unit. The resonators were applied to derive a photorefractive response of As[subscript 2]S[subscript 3] to λ=550 nm light. The resonator devices are a versatile platform for both sensing and glass material property investigation.
MIT Department
Massachusetts Institute of Technology. Materials Processing Center
Massachusetts Institute of Technology. Department of Materials Science and Engineering
Massachusetts Institute of Technology. Microphotonics Center
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DOI of Published Version
https://doi.org/10.1364/OL.33.000761