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Precision machine design for the semiconductor equipment manufacturing industry

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Author(s)
Van Doren, Matthew J., 1967-
Advisor(s)
Alexander Slocum.
Date Issued
1995
Publisher
Massachusetts Institute of Technology
Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1995.
Vita.
Includes bibliographical references (p. 293-301).
Subjects
Mechanical Engineering
MIT Department
Massachusetts Institute of Technology. Department of Mechanical Engineering
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