A sub-wavelength Si LED integrated in a CMOS platform
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s41467-023-36639-1.pdf
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Author(s)
Li, Zheng
Xue, Jin
de Cea, Marc
Kim, Jaehwan
Nong, Hao
Chong, Daniel
Lim, Khee Yong
Quek, Elgin
Ram, Rajeev J.
Date Issued
February 16, 2023
Journal
Nature Communications
Publisher
Springer Science and Business Media LLC
Citation
Li, Z., Xue, J., de Cea, M. et al. A sub-wavelength Si LED integrated in a CMOS platform. Nat Commun 14, 882 (2023).
Version
Final published version
Abstract
A nanoscale on-chip light source with high intensity is desired for various applications in integrated photonics systems. However, it is challenging to realize such an emitter using materials and fabrication processes compatible with the standard integrated circuit technology. In this letter, we report an electrically driven Si light-emitting diode with sub-wavelength emission area fabricated in an open-foundry microelectronics complementary metal-oxide-semiconductor platform. The light-emitting diode emission spectrum is centered around 1100 nm and the emission area is smaller than 0.14 μm2 (~$$\varnothing 400$$
∅ 400 nm). This light-emitting diode has high spatial intensity of >50 mW/cm2 which is comparable with state-of-the-art Si-based emitters with much larger emission areas. Due to sub-wavelength confinement, the emission exhibits a high degree of spatial coherence, which is demonstrated by incorporating the light-emitting diode into a compact lensless in-line holographic microscope. This centimeter-scale, all-silicon microscope utilizes a single emitter to simultaneously illuminate ~9.5 million pixels of a complementary metal-oxide-semiconductor imager.
∅ 400 nm). This light-emitting diode has high spatial intensity of >50 mW/cm2 which is comparable with state-of-the-art Si-based emitters with much larger emission areas. Due to sub-wavelength confinement, the emission exhibits a high degree of spatial coherence, which is demonstrated by incorporating the light-emitting diode into a compact lensless in-line holographic microscope. This centimeter-scale, all-silicon microscope utilizes a single emitter to simultaneously illuminate ~9.5 million pixels of a complementary metal-oxide-semiconductor imager.
Subjects
General Physics and Astronomy
General Biochemistry, Genetics and Molecular Biology
General Chemistry
Multidisciplinary
MIT Department
Massachusetts Institute of Technology. Research Laboratory of Electronics
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Creative Commons Attribution
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DOI of Published Version
https://doi.org/10.1038/s41467-023-36639-1
