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Adjoint-Based Sensitivity Analysis for Silicon Photonic Variations

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sword-2021-06-09T16:50:44.original.xml (130 B)
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Author(s)
Zhang, Zhengxing
•
El-Henawy, Sally I.
•
Sadun, Allan
•
Miller, Ryan
•
Daniel, Luca
•
White, Jacob K.
•
Boning, Duane S
Date Issued
October 2019
Journal
2019 IEEE MTT-S International Conference on Numerical Electromagnetic and Multiphysics Modeling and Optimization
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Citation
Zhengxing, Zhang et al. "Adjoint-Based Sensitivity Analysis for Silicon Photonic Variations." 2019 IEEE MTT-S International Conference on Numerical Electromagnetic and Multiphysics Modeling and Optimization, May 2019, Boston, MA, Institute of Electrical and Electronics Engineers, October 2019. © 2019 IEEE
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Author's final manuscript
Abstract
With the rising demand for integrated silicon photonics as a technology platform, it becomes crucial to provide variation-aware models and design for manufacturability (DFM) methods to inform the design of silicon photonic devices and circuits. In this paper, we demonstrate the application of the adjoint method to estimating the sensitivity of photonic components against key process variations inherited from integrated circuit fabrication technologies. In particular, we examine the impact of line edge roughness (LER) on a passive Y-branch, and validate our results with ensemble virtual fabrication simulations. The adjoint sensitivity and variance estimation of Y-branch transmission imbalance is seen to be highly efficient in comparison to direct ensemble simulation.
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Terms of Use
Creative Commons Attribution-Noncommercial-Share Alike
http://creativecommons.org/licenses/by-nc-sa/4.0/
Persistent DSpace Link
https://hdl.handle.net/1721.1/130927
DOI of Published Version
https://doi.org/10.1109/nemo.2019.8853679
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