Semiconductor cluster tool availability
Name
31280652-MIT.pdf
Description
Full printable version
Size
7.98 MB
Format
Adobe PDF
Checksum (MD5)
19919bbe00eb25685476a3bc64d1d143
Author(s)
Bailey, Troy A
Advisor(s)
James E. Chung.
Date Issued
1994
Publisher
Massachusetts Institute of Technology
Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1994, and Thesis (M.S.)--Massachusetts Institute of Technology, Sloan School of Management, 1994.
Includes bibliographical references (p. [131]-133).
Subjects
Electrical Engineering and Computer Science
Sloan School of Management
MIT Department
Sloan School of Management
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Terms of Use
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
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