Fabrication of distortion free x-ray masks using low stress tungsten
Name
26329614-MIT.pdf
Description
Full printable version
Size
9.18 MB
Format
Adobe PDF
Checksum (MD5)
d0528ee6032044713644858827a11653
Author(s)
Ku, Yao-Ching
Advisor(s)
Henry I. Smith.
Date Issued
1992
Publisher
Massachusetts Institute of Technology
Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1992.
Includes bibliographical references (leaves 113-115).
Subjects
Electrical Engineering and Computer Science
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
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