Demonstration of high-Q mid-infrared chalcogenide glass-on-silicon resonators
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Kimerling_Demonstration of high-q.pdf
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Author(s)
Lin, Hongtao
Li, Lan
Zou, Yi
Danto, Sylvain
Musgraves, J. David
Richardson, Kathleen
Kozacik, Stephen
Murakowski, Maciej
Prather, Dennis
Singh, Vivek
Date Issued
April 2013
Journal
Optics Letters
Publisher
Optical Society of America
Citation
Lin, Hongtao et al. “Demonstration of high-Q Mid-infrared Chalcogenide Glass-on-silicon Resonators.” Optics Letters 38.9 (2013): 1470. © 2013 Optical Society of America
Version
Final published version
Abstract
We demonstrated high-index-contrast, waveguide-coupled As[subscript 2]Se[subscript 3] chalcogenide glass resonators monolithically integrated on silicon fabricated using optical lithography and a lift-off process. The resonators exhibited a high intrinsic quality factor of 2 × 10[superscript 5] at 5.2 μm wavelength, which is among the highest values reported in on-chip mid-infrared (mid-IR) photonic devices. The resonator can serve as a key building block for mid-IR planar photonic circuits.
MIT Department
MIT Materials Research Laboratory
Massachusetts Institute of Technology. Department of Materials Science and Engineering
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Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use.
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DOI of Published Version
https://doi.org/10.1364/OL.38.001470
