In-situ Fourier transform infrared spectroscopy of chemistry and growth in chemical vapor deposition

Salim, Sateria

In-situ Fourier transform infrared spectroscopy of chemistry and growth in chemical vapor deposition

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Author(s)

Salim, Sateria

Advisor(s)

Klavs F. Jensen.

Date Issued

1995

Publisher

Massachusetts Institute of Technology

Description

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1995.

Includes bibliographical references (leaves 179-186).

Subjects

Chemical Engineering

MIT Department

Massachusetts Institute of Technology. Department of Chemical Engineering

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http://hdl.handle.net/1721.1/11378