Optimization of image formation in X-ray lithography using rigorous electromagnetic theory and experiments
Name
32052989-MIT.pdf
Description
Full printable version
Size
20.27 MB
Format
Adobe PDF
Checksum (MD5)
dbad078cbf286c0ad0ea21f72da4e0d1
Author(s)
Hector, Scott D. (Scott Daniel)
Advisor(s)
Henry I. Smith.
Date Issued
1994
Publisher
Massachusetts Institute of Technology
Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1994.
Includes bibliographical references (leaves 263-274).
Subjects
Electrical Engineering and Computer Science
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Terms of Use
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