A heat flow problem in electron beam etching of thin films
Name
08060626-MIT.pdf
Description
Full printable version
Size
3.93 MB
Format
Adobe PDF
Checksum (MD5)
3c97107740aa30db4c2b6b443f6a2342
Author(s)
Reed, Francis Keith
Advisor(s)
Ewan W. Fletcher.
Date Issued
1959
Publisher
Massachusetts Institute of Technology
Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering, 1959.
Includes bibliographical references (leaves 65-67).
Subjects
Electrical Engineering
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
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