On Dual Actuation in Atomic Force Microscopes
Name
IMST016.pdf
Size
316.74 KB
Format
Adobe PDF
Checksum (MD5)
ebc260c1fb10b16b6fe81a6a85ad4307
Author(s)
El Rifai, Khalid
El Rifai, Osamah M.
Youcef-Toumi, Kamal
Date Issued
January 2004
Series/Report no.
Innovation in Manufacturing Systems and Technology (IMST);
Abstract
In this paper, the problem of dual actuation in the atomic force microscope (AFM) is analyzed. The use of two actuators to balance the trade-off between bandwidth, range, and precision has been recently extended to nano-positioning systems. Despite existing demands, this concept undergoes fundamental limitations towards its extension to AFMs. This is attributed to the non-conventional requirement imposed on the control signal response, as it used to create the image of the characterized surface.
Subjects
dual actuation
atomic force microscope
piezotube
piezocantilever
plant transfer functions
feedback systems
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