White-light scanning interferometer for absolute nano-scale gap thickness measurement
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Youcef-toumi_White-light scanning.pdf
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Author(s)
Xu, Zhiguang
Youcef-toumi, Kamal
Yoon, Soon Fatt
Shilpiekandula, Vijay, 1979-
Date Issued
August 2009
Journal
Optics Express
Publisher
Optical Society of America
Citation
Xu, Zhiguang, Vijay Shilpiekandula, Kamal Youcef-toumi, and Soon Fatt Yoon. White-light Scanning Interferometer for Absolute Nano-scale Gap Thickness Measurement. Optics Express 17, no. 17 (August 11, 2009): 15104. © 2009 Optical Society of America
Version
Final published version
Abstract
A special configuration of white-light scanning interferometer is described for measuring the absolute air gap thickness between two planar plates brought into close proximity. The measured gap is not located in any interference arm of the interferometer, but acts as an amplitude-and-phase modulator of the light source. Compared with the common white-light interferometer our approach avoids the influence of the chromatic dispersion of the planar plates on the gap thickness quantification. It covers a large measurement range of from approximate contact to tens of microns with a high resolution of 0.1 nm. Detailed analytical models are presented and signal-processing algorithms based on convolution and correlation techniques are developed. Practical measurements are carried out and the experimental results match well with the analysis and simulation. Short-time and long-time repeatabilities are both tested to prove the high performance of our method.
MIT Department
Massachusetts Institute of Technology. Department of Mechanical Engineering
Singapore-MIT Alliance in Research and Technology (SMART)
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Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use.
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DOI of Published Version
https://doi.org/10.1364/OE.17.015104
