Temperature homogenization with tungsten absorber on X-ray mask
Name
31163384-MIT.pdf
Description
Full printable version
Size
1.76 MB
Format
Adobe PDF
Checksum (MD5)
ee70d90fc1043f88c9ed3453dbd43ba0
Author(s)
Li, Huiying
Advisor(s)
Henry I. Smith.
Date Issued
1994
Publisher
Massachusetts Institute of Technology
Description
Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1994.
Includes bibliographical references (leaves 53-55).
Subjects
Electrical Engineering and Computer Science
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
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