3D nanofabrication by volumetric deposition and controlled shrinkage of patterned scaffolds
Name
nihms-1010811.pdf
Description
Accepted version
Size
1.16 MB
Format
Adobe PDF
Checksum (MD5)
9584105a172de54fd61a0a8c76f933ee
Author(s)
Oran, Daniel David
Rodriques, Samuel Gordon
Gao, Ruixuan
Asano, Shoh
Skylar-Scot, Mark A.
Chen, Fei
Tillberg, Paul W.
Marblestone, Adam H.
Boyden, Edward S.
Date Issued
December 2018
Journal
Science
Publisher
American Association for the Advancement of Science (AAAS)
Citation
Oran, Daniel, et al., "3D nanofabrication by volumetric deposition and controlled shrinkage of patterned scaffolds." Science 362, 6420 (December 2018): p. 1281-5 doi 10.1126/SCIENCE.AAU5119 ©2018 Author(s)
Version
Author's final manuscript
Abstract
Lithographic nanofabrication is often limited to successive fabrication of two-dimensional (2D) layers. We present a strategy for the direct assembly of 3D nanomaterials consisting of metals, semiconductors, and biomolecules arranged in virtually any 3D geometry. We used hydrogels as scaffolds for volumetric deposition of materials at defined points in space. We then optically patterned these scaffolds in three dimensions, attached one or more functional materials, and then shrank and dehydrated them in a controlled way to achieve nanoscale feature sizes in a solid substrate. We demonstrate that our process, Implosion Fabrication (ImpFab), can directly write highly conductive, 3D silver nanostructures within an acrylic scaffold via volumetric silver deposition. Using ImpFab, we achieve resolutions in the tens of nanometers and complex, non–self-supporting 3D geometries of interest for optical metamaterials. ©2017
MIT Department
Program in Media Arts and Sciences (Massachusetts Institute of Technology)
Massachusetts Institute of Technology. Media Laboratory
Terms of Use
Creative Commons Attribution-Noncommercial-Share Alike
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DOI of Published Version
https://doi.org/10.1126/SCIENCE.AAU5119
