Interferometric lithography and selected applications
Name
37658981-MIT.pdf
Description
Full printable version
Size
4.38 MB
Format
Adobe PDF
Checksum (MD5)
b01e780343ae26a74f9efbfd4bb1d895
Author(s)
Farhoud, Maya S. (Maya Sami)
Advisor(s)
Henry I. Smith.
Date Issued
1997
Publisher
Massachusetts Institute of Technology
Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997.
Includes bibliographical references (leaves 52-53).
Subjects
Electrical Engineering and Computer Science
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Terms of Use
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