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GaN Nanowire Field Emitters with a Self-Aligned Gate Process

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Author(s)
Shih, Pao-Chuan
•
Rughoobur, Girish
•
Xiang, Peng
•
Liu, Kai
•
Cheng, Kai
•
Akinwande, Akintunde I.
•
Palacios, Tomas
Date Issued
June 2020
Journal
2020 Device Research Conference (DRC)
Publisher
IEEE
Citation
Shih, Pao-Chuan, Rughoobur, Girish, Xiang, Peng, Liu, Kai, Cheng, Kai et al. 2020. "GaN Nanowire Field Emitters with a Self-Aligned Gate Process." 2020 Device Research Conference (DRC).
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Author's final manuscript
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Massachusetts Institute of Technology. Microsystems Technology Laboratories
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DOI of Published Version
https://doi.org/10.1109/drc50226.2020.9135161
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