Polycrystalline Si thin films and devices : I. Seed selection through ion channeling II. Thin-film transistors
Name
18494059-MIT.pdf
Description
Full printable version
Size
5.96 MB
Format
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Checksum (MD5)
aa99a8df7725905b1e47bb6b18b4d6de
Author(s)
Kung, Kenneth Ting-Yuan
Advisor(s)
Rafael Reif.
Date Issued
1988
Publisher
Massachusetts Institute of Technology
Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1988.
Bibliography: leaves 109-116.
Subjects
Electrical Engineering and Computer Science.
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
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