Silicon micromachined wafer-bonded valves
Name
28896157-MIT.pdf
Description
Full printable version
Size
48.14 MB
Format
Adobe PDF
Checksum (MD5)
b9eef031ab791ef2d926e42e042fb2a5
Author(s)
Huff, Michael Allan
Advisor(s)
Martin A. Schmidt.
Date Issued
1993
Publisher
Massachusetts Institute of Technology
Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1993.
Includes bibliographical references (v. 2, leaves 429-436).
Subjects
Electrical Engineering and Computer Science
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Terms of Use
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
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