Mechanism of ion beam induced deposition

Dubner, Andrew D. (Andrew David)

Mechanism of ion beam induced deposition

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Author(s)

Dubner, Andrew D. (Andrew David)

Advisor(s)

Carl V. Thompson and John Melngailis.

Date Issued

1990

Publisher

Massachusetts Institute of Technology

Description

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1990.

Includes bibliographical references (leaves 174-177).

Subjects

Materials Science and Engineering

MIT Department

Massachusetts Institute of Technology. Department of Materials Science and Engineering

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