High-speed programmable photonic circuits in a cryogenically compatible, visible–near-infrared 200 mm CMOS architecture
Name
s41566-021-00903-x.pdf
Description
Published version
Size
3.2 MB
Format
Adobe PDF
Checksum (MD5)
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Author(s)
Dong, Mark
Clark, Genevieve
Leenheer, Andrew J
Zimmermann, Matthew
Dominguez, Daniel
Menssen, Adrian J
Heim, David
Gilbert, Gerald
Englund, Dirk
Eichenfield, Matt
Date Issued
2022
Journal
Nature Photonics
Publisher
Springer Science and Business Media LLC
Citation
Dong, Mark, Clark, Genevieve, Leenheer, Andrew J, Zimmermann, Matthew, Dominguez, Daniel et al. 2022. "High-speed programmable photonic circuits in a cryogenically compatible, visible–near-infrared 200 mm CMOS architecture." Nature Photonics, 16 (1).
Version
Final published version
Abstract
AbstractRecent advances in photonic integrated circuits have enabled a new generation of programmable Mach–Zehnder meshes (MZMs) realized by using cascaded Mach–Zehnder interferometers capable of universal linear-optical transformations on N input/output optical modes. MZMs serve critical functions in photonic quantum information processing, quantum-enhanced sensor networks, machine learning and other applications. However, MZM implementations reported to date rely on thermo-optic phase shifters, which limit applications due to slow response times and high power consumption. Here we introduce a large-scale MZM platform made in a 200 mm complementary metal–oxide–semiconductor foundry, which uses aluminium nitride piezo-optomechanical actuators coupled to silicon nitride waveguides, enabling low-loss propagation with phase modulation at greater than 100 MHz in the visible–near-infrared wavelengths. Moreover, the vanishingly low hold-power consumption of the piezo-actuators enables these photonic integrated circuits to operate at cryogenic temperatures, paving the way for a fully integrated device architecture for a range of quantum applications.
MIT Department
Massachusetts Institute of Technology. Research Laboratory of Electronics
Terms of Use
Creative Commons Attribution 4.0 International license
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DOI of Published Version
https://doi.org/10.1038/S41566-021-00903-X
