Analysis of a diamond CVD process using computer simulation
Name
36152102-MIT.pdf
Description
Full printable version
Size
4.43 MB
Format
Adobe PDF
Checksum (MD5)
4ee646c4d1aa257e0df0eb7a81a68b11
Author(s)
Nagai, Masaki
Advisor(s)
David K. Roylance.
Alternative Title
Analysis of a diamond chemical vapor deposition process using computer simulation.
Date Issued
1996
Publisher
Massachusetts Institute of Technology
Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1996.
Includes bibliographical references (leaves 98-100).
Subjects
Materials Science and Engineering
MIT Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
Terms of Use
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