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Nonlinear model reduction methods for rapid thermal and chemical vapor deposition processes

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Author(s)
Banerjee, Suman K. (Suman Kumar), 1972-
Advisor(s)
Klavs F. Jensen.
Date Issued
1998
Publisher
Massachusetts Institute of Technology
Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1998.
Includes bibliographical references.
Subjects
Chemical Engineering
MIT Department
Massachusetts Institute of Technology. Department of Chemical Engineering
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http://dspace.mit.edu/handle/1721.1/7582
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http://hdl.handle.net/1721.1/49640
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