Laser linking of metal interconnect : process considerations and failure analysis using focused ion beam milling
Name
34311938-MIT.pdf
Description
Full printable version
Size
6.14 MB
Format
Adobe PDF
Checksum (MD5)
56a4e2fdb70af94b757883f54740e0af
Author(s)
Rasera, Roy L. (Roy Louis)
Advisor(s)
Joseph B. Bernstein.
Date Issued
1995
Publisher
Massachusetts Institute of Technology
Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1995.
Includes bibliographical references (leaves 104-106).
Subjects
Materials Science and Engineering
MIT Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
Terms of Use
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