SiGe virtual substrate engineering for integration of III-V materials, microelectromechanical systems, and strained silicon MOSFETs with silicon
Name
48172043-MIT.pdf
Description
Full printable version
Size
12.96 MB
Format
Adobe PDF
Checksum (MD5)
f64fee2fc7d0de5466058f2ecab57242
Author(s)
Currie, Matthew Thomas, 1973-
Advisor(s)
Eugene A. Fitzgerald.
Date Issued
2001
Publisher
Massachusetts Institute of Technology
Description
Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2001.
Includes bibliographical references (p. 184-191).
Subjects
Materials Science and Engineering.
MIT Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
Terms of Use
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