Electrostatic electron mirror in SEM for simultaneous imaging of top and bottom surfaces of a sample
Name
Mirror_paper_Ultramicroscopy_revisions_2-1.pdf
Description
Accepted version
Size
9.58 MB
Format
Adobe PDF
Checksum (MD5)
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Author(s)
Abedzadeh, Navid
Krielaart, MAR
Kim, Chung-Soo
Simonaitis, John
Hobbs, Richard
Kruit, Pieter
Berggren, Karl K
Date Issued
2021
Journal
Ultramicroscopy
Publisher
Elsevier BV
Citation
Abedzadeh, Navid, Krielaart, MAR, Kim, Chung-Soo, Simonaitis, John, Hobbs, Richard et al. 2021. "Electrostatic electron mirror in SEM for simultaneous imaging of top and bottom surfaces of a sample." Ultramicroscopy, 226.
Version
Author's final manuscript
Abstract
The use of electron mirrors in aberration correction and surface-sensitive microscopy techniques such as low-energy electron microscopy has been established. However, in this work, by implementing an easy to construct, fully electrostatic electron mirror system under a sample in a conventional scanning electron microscope (SEM), we present a new imaging scheme which allows us to form scanned images of the top and bottom surfaces of the sample simultaneously. We believe that this imaging scheme could be of great value to the field of in-situ SEM which has been limited to observation of dynamic changes such as crack propagation and other surface phenomena on one side of samples at a time. We analyze the image properties when using a flat versus a concave electron mirror system and discuss two different regimes of operation. In addition to in-situ SEM, we foresee that our imaging scheme could open up avenues towards spherical aberration correction by the use of electron mirrors in SEMs without the need for complex beam separators.
MIT Department
Massachusetts Institute of Technology. Research Laboratory of Electronics
Terms of Use
Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International Licens
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DOI of Published Version
https://doi.org/10.1016/J.ULTRAMIC.2021.113304
