Nanocomposite Thin Films for both Mechanical and Functional Applications
Name
AMMNS014.pdf
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370.8 KB
Format
Adobe PDF
Checksum (MD5)
c1104773c96ee941434db9502525db91
Author(s)
Zhang, Sam
Fu, Yongqing
Du, Hejun
Liu, Yang
Chen, Tupei
Date Issued
January 2004
Series/Report no.
Advanced Materials for Micro- and Nano-Systems (AMMNS);
Abstract
The design methodology and realization of nanocomposite films aiming for mechanical (superhardness, toughness) and functional (optical, microelectronic) properties were discussed in this paper. Superhard TiCrCN and nc-TiN/a-SiNx films and super-tough nc-TiC/a-C(Al) films were prepared through co-sputtering method by optimal design of microstructure. The nanocrystalline silicon (nc-Si) passivated with a matrix of thermally grown silicon dioxide were prepared using implantation of Si into SiO₂ film, and showed improved photoluminescence and optical properties. Also discussed is the nano-composite design of thin film resistor with optimized temperature coefficient of resistivity.
Subjects
nanocomposite
films
superhardness
toughness
photoluminescence
optical
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