Electrospray Deposition of Uniform Thickness Ge[subscript 23]Sb[subscript 7]S[subscript 70] and As[subscript 40]S[subscript 60] Chalcogenide Glass Films
Name
Novak-2016-Electrospray Deposit.pdf
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Author(s)
Novak, Spencer
Lin, Pao-Tai
Li, Cheng
Borodinov, Nikolay
Malinowski, Marcin
Fathpour, Sasan
Lumdee, Chatdanai
Xu, Chi
Kik, Pieter G.
Deng, Weiwei
Alternative Title
Electrospray Deposition of Uniform Thickness Ge23Sb7S70 and As40S60 Chalcogenide Glass Films
Date Issued
August 2016
Journal
Journal of Visualized Experiments
Publisher
MyJoVE Corporation
Citation
Novak, Spencer et al. “Electrospray Deposition of Uniform Thickness Ge[subscript 23]Sb[subscript 7]S[subscript 70] and As{subscript 40]S[subscript 60] Chalcogenide Glass Films.” Journal of Visualized Experiments 114 (2016): n. pag. © 2016 Journal of Visualized Experiments
Version
Final published version
Abstract
Solution-based electrospray film deposition, which is compatible with continuous, roll-to-roll processing, is applied to chalcogenide glasses. Two
chalcogenide compositions are demonstrated: Ge[subscript 23]Sb[subscript 7]S[subscript 70] and As[subscript 40]S[subscript 60] , which have both been studied extensively for planar mid-infrared (midIR)
microphotonic devices. In this approach, uniform thickness films are fabricated through the use of computer numerical controlled (CNC)
motion. Chalcogenide glass (ChG) is written over the substrate by a single nozzle along a serpentine path. Films were subjected to a series of
heat treatments between 100 °C and 200 °C under vacuum to drive off residual solvent and densify the films. Based on transmission Fourier
transform infrared (FTIR) spectroscopy and surface roughness measurements, both compositions were found to be suitable for the fabrication of planar devices operating in the mid-IR region. Residual solvent removal was found to be much quicker for the As[subscript 40]S[subscript 60] film as compared to Ge[subscript 23]Sb[subscript 7]S[subscript 70]. Based on the advantages of electrospray, direct printing of a gradient refractive index (GRIN) mid-IR transparent coating is
envisioned, given the difference in refractive index of the two compositions in this study.
MIT Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
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DOI of Published Version
https://doi.org/10.3791/54379
