Fabrication of ultra-thin strained silicon on insulator
Name
53225571-MIT.pdf
Description
Full printable version
Size
15.86 MB
Format
Adobe PDF
Checksum (MD5)
28e1f87dbeb363fcfa03d06e99045af9
Author(s)
Drake, Tonya S. (Tonya Sue), 1978-
Advisor(s)
Judy L. Hoyt.
Alternative Title
Fabrication of ultra-thin SSOI
Date Issued
2003
Publisher
Massachusetts Institute of Technology
Description
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2003.
Includes bibliographical references (p. 126-130).
Subjects
Electrical Engineering and Computer Science.
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Terms of Use
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