Atomic Force Microscope: Modeling, Simulations, and Experiments
Name
IMST003.pdf
Size
396.4 KB
Format
Adobe PDF
Checksum (MD5)
4dd725116d24c6b5819dc8e1bb8d0d83
Author(s)
El Rifai, Osamah M.
Youcef-Toumi, Kamal
Date Issued
January 2002
Series/Report no.
Innovation in Manufacturing Systems and Technology (IMST);
Abstract
The quality of atomic force microscope (AFM) data strongly depends on scan and controller parameters. Data artifacts can result from poor dynamic response of the instrument. In order to achieve reliable data, dynamic interactions between AFM components need to be well understood and controlled. In this paper we present a summary of our work in this direction. It includes models for the probe-sample interaction, scanner lateral and longitudinal dynamics, scanner creep, and cantilever dynamics. The models were used to study the effect of scan parameters on the system dynamics. Simulation results for both frequency response and imaging were presented. Experimental results were given supporting the simulations and demonstrating the competence of the models. The results within will be used to develop algorithms that allow automated choice of key system parameters, guaranteeing reliable and artifact-free data for any given operating condition (sample, cantilever, environment). Consequently, expanding the AFM capabilities and permitting its use in a wider range of applications.
Subjects
AFM
model
experiments
simulation
control
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