Fabrication of triangular nanobeam waveguide networks in bulk diamond using single-crystal silicon hard masks
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Englund_Fabrication of.pdf
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Author(s)
Li, L.
Zheng, J.
Lu, M.
Stein, A.
Ruggiero, C. A.
Salzman, J.
Kalish, R.
Bayn, Igal
Mouradian, Sara L.
Goldstein, Jordan A.
Date Issued
November 2014
Journal
Applied Physics Letters
Publisher
American Institute of Physics (AIP)
Citation
Bayn, I., S. Mouradian, L. Li, J. A. Goldstein, T. Schroder, J. Zheng, E. H. Chen, et al. “Fabrication of Triangular Nanobeam Waveguide Networks in Bulk Diamond Using Single-Crystal Silicon Hard Masks.” Applied Physics Letters 105, no. 21 (November 24, 2014): 211101.
Version
Original manuscript
Abstract
A scalable approach for integrated photonic networks in single-crystal diamond using triangular etching of bulk samples is presented. We describe designs of high quality factor (Q = 2.51 × 10[superscript 6]) photonic crystal cavities with low mode volume (V[subscript m] = 1.062 × (λ/n)[superscript 3]), which are connected via waveguides supported by suspension structures with predicted transmission loss of only 0.05 dB. We demonstrate the fabrication of these structures using transferred single-crystal silicon hard masks and angular dry etching, yielding photonic crystal cavities in the visible spectrum with measured quality factors in excess of Q = 3 × 10[superscript 3].
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Massachusetts Institute of Technology. Media Laboratory
Massachusetts Institute of Technology. Research Laboratory of Electronics
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DOI of Published Version
https://doi.org/10.1063/1.4902562
