Oxide etching with NF₃ hydrocarbon chemistries for global warming emissions reduction
Name
49201932-MIT.pdf
Description
Full printable version
Size
42.54 MB
Format
Adobe PDF
Checksum (MD5)
8e6e9f4f530aac01a7c20456b52f36f5
Author(s)
Pruette, Laura C. (Laura Catherine), 1974-
Advisor(s)
Rafael Reif.
Date Issued
2001
Publisher
Massachusetts Institute of Technology
Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2001.
Includes bibliographical references (p. 295-301).
Subjects
Electrical Engineering and Computer Science.
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Terms of Use
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
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